Phosphoric acid Electronic Grade belongs to high purity phosphoric acid, widely used in large-scale integrated circuit, thin film liquid crystal display (TFT-LCD) and other microelectronics industry. Phosphoric acid Electronic Grade is mainly used for chip cleaning and etching, and its purity and cleanliness have a great impact on the yield, electrical performance and reliability of electronic components.
Specifications:
Items
Units
E1(LCD grade)
E2(IC grade)
H3PO4
%
85-87
85-87
H3PO3
%
≤0.005
≤0.001
NO3
mg/kg
≤5
≤0.5
SO4
mg/kg
≤10
≤5
Cl …